Costs
Access for third-party projects
via DFG
We recommend FZJ as applicant or associated partner. Only then a use by DFG cost rates is possible. DFG funds up to € 60 thousand for cleanroom use. For research partners who have a cooperation agreement with us, the use is free with a DFG project. The cost of material consumption had to be completely charged (19% VAT)
via BMBF or EU
We recommend FZJ as applicant or associated partner. Only then a use by the BMBF or EU costs rates is possible.
via cooperation agreement
The access is regulated via cooperation agreements between the Research Centre Jülich and the using institution (university, college, research institute, etc.) in combination with an R & D contract (institution, department, etc.) of the institution. Package arrangements are possible.
as an industrial partner
If there is not a cooperation agreement and/or R & D contract between the Research Centre Jülich and the user the access is billed for full cost.
Cost rates for industrial partners in €/h + 19% VAT
EBPG 5000 326 | PLS 500 173 | PLS 570 163 | PECVD1 25 | PECVD2 48 | EVO2 41 |
RIE3 51 | RIE 4 50 | RIE5 55 | RIE6 58 | RIE7 53 | TePLa 360 11 |
MA1 35 | MA2 33 | MA3 34 | MA4 56 | Saw 37 | Tempress 52 |
CLV1/2 30 | RTP 54 | SSEC 37 | RBS 200 | Imprint 31 | Implanter 346 |
| Univex 400 | Se 800 21 | ALD 104 | Sigma 300 51 | Dektak 16 | STM 17 |
WB-Si 25 | WB-3/5 20 | WB-Bio 30 | Preclean 23 | WB-Mask 32 | SEM Zeiss 49 |
SEM FEI 237 | FIB FEI 296 |
